Buy Pumpgard II Filters from Flokal BV- WorldOfChemicals
Pumpgard II Filters

Pumpgard II filters protect chemical pumps and final filters against damage from broken silicon wafer pieces. Pumpgard II filters have a 60 µm retention rating, which is ideal to capture larger wafer pieces before they reach the pump and/or final filter. Within the normal operation of a wet bench, process wafers can break and release wafer shards into the process bath. These shards can cause damage to the bellows (made of Teflon® fluoropolymer resin) or to diaphragms within the pump. Pumpgard II filters, installed on the upstream side of the recirculation pump, can remove shards from process chemical baths before damage to expensive chemical pumps occurs.

Flokal BV

Dorpenweg 27, Deursen.


00 31 48641 6240

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