Methylsilane Properties, Molecular Formula, Applications - WorldOfChemicals
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Methylsilane Properties

Methylsilane

Molecule Structure Image

Description

 

Methylsilane is used in the epitaxial CVD of Si-Ge-C films and as a precursor to the epitaxial growth of SiGeC alloy layers via rapid thermal CVD.

Chemical Properties

Appearance Colorless
Boiling Point -57°C
CAS Number 992-94-9
Density 0.628 g/cm3
EINECS Number 213-598-5
InChI 1S/CH6Si/c1-2/h1-2H3
InChIKey UIUXUFNYAYAMOE-UHFFFAOYSA-N
Melting Point -157°C
Molar Mass 46.14 g/mol
Molecular Formula CH6Si
NFPA 704 H-0,F-4,R-0,C-NA
Synonyms Silylmethane; Monosilylmethane
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