PENNSYLVANIA, US: Air Products announced that its new electronic materials facility in Banwol, Korea has completed start-up and is successfully on-line. The newly commercialized materials produced at this facility will enable semiconductor manufacturers to create advanced generation devices.
As device geometries continue to shrink in size, there are increasing needs for new dielectric materials to address process needs such as lower thermal budget and filling of nanometer-scale features. The Banwol facility enables flexible manufacturing of a wide variety of new dielectric products.
“The new materials produced at our Banwol facility, will enable deposition of silicon nitride and oxide films, for a variety of emerging applications including spacers, sacrificial films, protection layers, etch stops and diffusion barriers,” said John Langan, Director of Technology, Electronics, Air Products.
These new products are needed for developing cutting-edge portable devices, such as smartphones and tablet computers.
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