Voltaix, Linde expand disilane capacity in US

Voltaix, Linde to expand disilane capacity in US

6:46 AM, 29th January 2013
Voltaix, Linde to expand disilane capacity in US

BRANCHBURG, US: Voltaix Inc and Linde Electronics signed an agreement to expand disilane (Si2H6) capacity with the construction of a 40 metric tonne Ultra High Purity (UHP) disilane plant. The plant, employing Voltaix patented technology, is located at Voltaix’s recently constructed, state-of-the-art manufacturing site in Upper Mt Bethel Township, Pennsylvania, US. New capacity is required to meet the global market demand and the plant is now in operation and customer qualification is underway. The two companies are also discussing plans to install disilane supporting infrastructure at a Voltaix site in Asia.

“Through the help of one of our key distribution partners, Linde Electronics, Voltaix will become a leading high volume manufacturer of disilane. Disilane is a critical material for low temperature polysilicon deposition in memory and logic device structures. Its versatility enables it to be used in existing batch furnace and single wafer tool sets with a higher deposition rate providing increased throughput versus that of silane,” said Dr Peter Smith, CEO, Voltaix.

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